Fabrication and characterization of high quality nano-diamonds by hot filament CVD

T. Zhang,  F.H. Sun*,  B. Shen,  Z.M. Zhang


Abstract: The hot filament chemical vapor deposition technique (HFCVD) is used to fabricate high quality nano-diamonds. In order to obtain a high density of nano-crystals of diamond that do not join together to form a continuous films, the nucleation density or rate need to be controlled by regulating the pre-treatment method for substrate, bias intensity and deposition time. After the experiments, the morphology and quality of the as-grown nano-diamonds are observed and analyzed by FESEM (field emission scanning electron microscopy). The results show that the as-deposited nano-diamonds (~220nm) appear a well-defined morphology with (111) and (100).

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