Investigation of temperature annealing effects on the optical properties of ZnO films by using surface plasmon resonance

Ming Bao, Hui Wang, Dongmei Jiang, Wenjuan Cheng, Xueming Ma*



Surface plasmon resonance (SPR) technique was used to optically characterize ZnO thin films. ZnO films with the thickness of 200 nm have been deposited onto Ag/glass substrates by radio frequency magnetron (RF) sputtering. The as-deposited films were annealed in air at different temperatures from 100 °C to 400 °C for 1 h. By using fitting of the SPR curves with Fresnel’s theory, dielectric constant at optical frequency of the prepared thin films were determined. The work shows an efficient method to calculate optical properties of thin film and highlight a promising application of the SPR based system as a temperature sensor.

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